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5) Chemical reaction engineering

5-h. CVD & dry processes

最終更新日時：2026-10-03 18:44:01

Popular Keywords in
this topics		KeywordsCount
Supercritical Fluid Deposition5*
SiC2
CVD2
Chemical Vapor Deposition2
Atomic Layer Deposition2
Copper Deposition2
Process informatics2
ALD1

Acknowledgement
number		Title/AuthorsKeywordsStyle
88Development of solution-based Fe/MgO catalyst for the synthesis of submillimeter-long carbon nanotubes
(Waseda U.) *(Stu)Matsukawa Yoshiyuki・ (Reg)Mae Tomotaro・ (Reg)Osawa Toshio・ (Panasonic Energy) Kato Masaki・ (Waseda U.) (Reg)Noda Suguru		Carbon nanotubes
Chemical vapor deposition
Fe/MgO catalyst
P
115Separate heating of catalyst and carbon sources in gas-phase synthesis of carbon nanotubes
(Waseda U.) *(Stu)Ando Koyo・ (Reg)Osawa Toshio・ (Reg)Noda Suguru		carbon nanotube
floating catalyst chemical vapor deposition
computational fluid dynamics
P
134Control Techniques of selectivity using Hydrazine for SiN-ALD
(Kumamoto U./Taiyo Nippon Sanso) *(Stu)Murata Hayato・ (Taiyo Nippon Sanso) (Cor)Wada Yoshifumi・ (Reg)Shimizu Hideharu・ (Kumamoto U.) (Reg)Momose Takeshi		Atomic layer deposition
Area selective deposition
Hydrazine
O
202Kinetic analysis of CO2-driven ZnO formation using in-situ Raman spectroscopy
(Science Tokyo) *(Reg)Orita Yasuhiko・ (Stu)Muronosono Aoi・ (Reg)Shimoyama Yusuke		In-situ Raman spectroscopy
High-pressure CO2
ZnO formation
O
528Control of a High-Speed Switching Valve for On-Demand Precursor Delivery in ALD
(Kumamoto U.) *(Stu)Ishida Kanta・ (Kumamoto U./HORIBA STEC) Nishizato Hiroshi・ (Kumamoto U.) (Stu)Oda Shota・ (HORIBA STEC) Nakaya Yugo・ (Kumamoto U.) Nasu Kinichi・ Okajima Hiroshi・ (Reg)Momose Takeshi		Atomic Layer Deposition
Sustainable
Valve
O
592Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(1)
(Kumamoto U.) *(Stu)Sanai Seitaro・ (Stu)Oda Shota・ Hashishin Takeshi・ Akai Ichiro・ (Reg)Momose Takeshi		Process informatics
Physsics-informed Bayesian Optimization
Supercritical fluid deposition
O
603Process Informatics Framework for Optimal Control in Supercritical Fluid Deposition(2)
(Kumamoto U.) *(Stu)Oda Shota・ (Stu)Sanai Seitaro・ Hashishin Takeshi・ Akai Ichiro・ (Reg)Momose Takeshi		Process informatics
Physics-informed bayesian optimization
Supercritical fluid deposition
O
604Investigation of Rapid and Conformal Conditions for Cu Film Formation using Supercritical Fluid Deposition on High-Aspect-Ratio Structures
(Kumamoto U.) *(Stu)Nakamura Arisa・ (Stu)Kondo Sumiya・ (Stu)Oda Shota・ Nishi Yuta・ Yokoyama Akira・ (Reg)Momose Takeshi		Supercritical Fluid Deposition
Copper Deposition
High growth rate
O
639Surface reaction mechanism analysis of SiC chemical vapor deposition using Neural Network Potentials
(U. Tokyo) *(Stu)Yoshida Koki・ (Reg)Otaka Yuhei・ (Reg)Sato Noboru・ (Reg)Tamaoki Naoki・ (Reg)Tsukune Atsuhiro・ (IHI) (Reg)Fukushima Yasuyuki・ (U. Tokyo) (Reg)Shimogaki Yukihiro		SiC
Chemical Vapor Deposition
Neural network potential
O
672Validation of reaction models for the SiC-CVD process using Quadrupole Mass Spectrometry
(U. Tokyo) *(Stu)Yoshida Koki・ (Reg)Otaka Yuhei・ (Reg)Sato Noboru・ (Reg)Tamaoki Naoki・ (Reg)Tsukune Atsuhiro・ (IHI) (Reg)Fukushima Yasuyuki・ (U. Tokyo) (Reg)Shimogaki Yukihiro		SiC
CVD
Quadrupole Mass Spectrometry
O
676Investigation of Low-Temperature AlN Deposition and Thermal Conductivity Enhancement by TMA/NH3-Based FM-CVD
(U. Tokyo) *(Reg)Otaka Yuhei・ Lu Yin-Chi・ (Stu)Hatakeyama Daiki・ (Reg)Yamaguchi Jun・ (Reg)Tamaoki Naoki・ (Reg)Sato Noboru・ (Reg)Tsukune Atsuhiro・ (Reg)Shimogaki Yukihiro		AlN
CVD
3DIC
O
684Measurement of Surface Reaction Rate Constanst and Adsorption Equilibrium Constants in Supercritical Fluid Deposition of Cu
(Kumamoto U.) *(Stu)Kondo Sumiya・ (Stu)Oda Shota・ (Kumamoto U./U. Tokyo) Nakamura Arisa・ (Kumamoto U.) (Reg)Momose Takeshi		Supercritical Fluid Deposition
Copper Deposition
Langmuir-Hinshelwood reaction kinetics
O
696Supercritical Fluid Deposition (SCFD) Method for Terahertz Wave Device Formation
(Kumamoto U.) *(Stu)Uehara Koki・ (Reg)Momose Takeshi		Supercritical Fluid Deposition
Supecritical Fluid Extraction
Copper Deposition on Polymer
O
700Study of the Initial Nucleation Process in Pd-ALD Using Pd(hfac)2
(U. Tokyo) *(Stu)Mori Wataru・ (Stu)Nagai Souga・ (Reg)Deng Yubin・ (Reg)Otaka Yuhei・ (Reg)Yamaguchi Jun・ (Reg)Sato Noboru・ (Reg)Tamaoki Naoki・ (Reg)Tsukune Atsuhiro・ (Reg)Shimogaki Yukihiro		palladium
ALD
nucleation
P
712Study of a Co ALD Process Using a Novel Co Precursor with Neural Network Potentials
(U. Tokyo) *(Stu)Tanichi Keisuke・ (Reg)Sato Noboru・ (Reg)Tamaoki Naoki・ (Reg)Tsukune Atsuhiro・ (Reg)Shimogaki Yukihiro		Co ALD
Newral Network Potential
Reaction Design
P
List of received applications (By symposium/topics code)
List of received applications
SCEJ 91st Annual Meeting (Kyoto, 2026)

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